JPH0312442U - - Google Patents
Info
- Publication number
- JPH0312442U JPH0312442U JP7394689U JP7394689U JPH0312442U JP H0312442 U JPH0312442 U JP H0312442U JP 7394689 U JP7394689 U JP 7394689U JP 7394689 U JP7394689 U JP 7394689U JP H0312442 U JPH0312442 U JP H0312442U
- Authority
- JP
- Japan
- Prior art keywords
- boron
- bpsg film
- film
- semiconductor device
- aluminum wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 9
- 229910052796 boron Inorganic materials 0.000 claims description 9
- 239000005380 borophosphosilicate glass Substances 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 239000011229 interlayer Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7394689U JPH0312442U (en]) | 1989-06-22 | 1989-06-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7394689U JPH0312442U (en]) | 1989-06-22 | 1989-06-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0312442U true JPH0312442U (en]) | 1991-02-07 |
Family
ID=31613205
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7394689U Pending JPH0312442U (en]) | 1989-06-22 | 1989-06-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0312442U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009007708A (ja) * | 2007-06-28 | 2009-01-15 | Seiji Fujii | 被服 |
-
1989
- 1989-06-22 JP JP7394689U patent/JPH0312442U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009007708A (ja) * | 2007-06-28 | 2009-01-15 | Seiji Fujii | 被服 |